Infrared Heating Technology for the Semiconductor Industry

Infrared radiation is a reliable heat source for many industrial heating processes. Infrared heating technology transfers large amounts of energy in a short time. IR saves energy because it can be switched on and off quickly and easily. Heraeus infrared heat technology provides important benefits: heating only where it is require; the optimal wavelength for the product to be heated, and integration with your process.

Operating in Vacuum

Infrared heating technology requires no contact with the material, and no intermediate medium (such as air or water) is needed. This means that Heraeus IR heaters can be used in vacuum conditions. Heraeus can manufacture lamps with specific sockets, leads and voltages to meet demanding vacuum applications. Industrial uses for infrared in vacuum situations include:
  • Heater wafers in de-gassing and annealing processes
  • Recycling process (such as those involving sulfuric acid)
  • Drying of silicon wafers
  • Heating of floatglass prior to coating
These examples are by no means a complete list. Infrared heat is an effective and efficient means of applying process heat in photovoltaics and many other applications.

Explore this site for application solutions employing infrared technology. Heraeus offers complete systems using infrared technology; we can design a system to meet your specific, unique and demanding needs.
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Heraeus Noblelight  •  Buford GA 30518 USA  •  Phone 678.835.5764  •  Email sales@noblelight.net