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Heraeus : Solutions in Applied Light

EXCIMER ADVANTAGES

Advantages and Benefits

  • Quasi-monochromatic incoherent radiation
  • High output, for the first time, in the VUV at 172nm (126nm in preparation)
  • "Cold" lamps: suitable for use with heat-sensitive materials
  • Large area applications
  • Continuous operation possible
  • Pulse control provided; lower energy consumption, rapid shutdown
  • Adaptable lamp system geometry even around objects (3D suitability)
  • Instant strike, immediate UV output
  • Constant UV output over entire service life (option)
  • Fewer processing steps: goals are reached more quickly using less equipment and at lower cost
  • Environmental benefits: reduction in the use of chemicals for processing, materials savings and less waste
  • Ozone-free design available

 

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